The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control.
**Abstract** The state-of-the-art secondary ion mass spectrometry (SIMS) device, NanoSIMS 50L, enables imaging measurements with spatial resolution approximately two orders of magnitude higher than conventional SIMS, thanks to its ion beam with a probe diameter of about 50 nm and a highly efficient mass analysis system. This paper introduces the features of the NanoSIMS 50L device and analysis examples. **Table of Contents** 1. Introduction 2. Overview of the Analytical Device 3. Analysis Example of Hair Cross-Section 4. Analysis Example of SiC Semiconductor Devices 5. Conclusion
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Technical Information Magazine The TRC News "High-Sensitivity Imaging Analysis of Micro Areas Using the Cutting-Edge SIMS Analysis Device 'NanoSIMS 50L'" [Abstract] The cutting-edge secondary ion mass spectrometry (SIMS) device, NanoSIMS 50L, enables imaging measurements with spatial resolution approximately two orders of magnitude higher than conventional SIMS, thanks to the combination of an ion beam with a probe diameter of about 50 nm and a highly transmissive mass analysis system. This paper introduces the features of the NanoSIMS 50L device and analysis examples. [Table of Contents] 1. Introduction 2. Overview of the Analysis Device 3. Analysis Example of Hair Cross-Section 4. Analysis Example of SiC Semiconductor Devices 5. Conclusion [Figures and Tables] Figure 1: Appearance of the NanoSIMS 50L Device Table 1: Features of the NanoSIMS 50L Figure 2: Cross-Sectional Structure of Hair Figure 3: Imaging of Sulfur (S) in Hair Cross-Section Using NanoSIMS 50L Figure 4: Three-Dimensional Imaging of Aluminum (Al), Silicon (Si), and Phosphorus (P) in SiC Figure 5: Two-Dimensional Imaging of Phosphorus (P) and Oxygen (O) in SiC Devices and Extracted Areas, Depth Profile of P Extracted from Two-Dimensional Imaging
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At Toray Research Center, Inc., we provide technical support through analytical techniques and physical property analysis to address various challenges in research and development as well as production fields via contract analysis. Based on our long-standing achievements and extensive experience in analysis and physical property evaluation, we continue to strive to meet the advanced and diverse needs of our customers.
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