The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control.
**Abstract** In recent years, with the high integration of various devices, evaluation in localized areas has become extremely important for product development and functional enhancement. The newly introduced RBS device at the Toray Research Center is equipped with a microbeam line capable of converging high-speed ion beams to a minimum of 1 μm in diameter, enabling precise composition and density analysis in small areas. Additionally, the increase in incident ion species and the acceleration of incident ions have significantly improved the sensitivity for light elements and the mass resolution for heavy elements compared to conventional methods. This paper introduces these new functions along with case studies. **Table of Contents** 1. Introduction 2. Composition Analysis of Small Areas Using μRBS 3. High-Sensitivity Measurement of Light Elements Using NRA 4. Improvement of Mass Resolution for Heavy Elements 5. Conclusion
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Technical Information Magazine The TRC News "Introduction of a New RBS Device – High Sensitivity and High Precision Composition Analysis in Microscopic Areas –" [Abstract] In recent years, with the high integration of various devices, evaluation in localized areas has become extremely important for product development and functional enhancement. The new RBS device is equipped with a microbeam line capable of converging a high-speed ion beam to a minimum of 1 μm in diameter, enabling accurate composition and density analysis in small areas. Additionally, the increase in the types of incident ions and the acceleration of incident ions have achieved significant sensitivity improvements for light elements and enhanced mass resolution for heavy elements compared to conventional methods. This paper introduces these new features along with case studies. [Table of Contents] 1. Introduction 2. Composition Analysis of Microscopic Areas Using μRBS 3. High Sensitivity Measurement of Light Elements Using NRA 4. Improvement of Mass Resolution for Heavy Elements 5. Conclusion [Figures and Tables] Figures 1 to 8 RBS spectra obtained from each RGB pixel Mass resolution and sensitivity of each element (theoretical calculations) SiON film (100 nm)/Si substrate: RBS spectrum, NRA spectrum IGZO film (300 nm)/Si substrate: RBS spectrum Comparison of Ga/Zn ratio in IGZO film
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At Toray Research Center, Inc., we provide technical support through analytical techniques and physical property analysis to address various challenges in research and development as well as production fields via contract analysis. Based on our long-standing achievements and extensive experience in analysis and physical property evaluation, we continue to strive to meet the advanced and diverse needs of our customers.
