Adopting a Class 1 compliant multi-joint arm robot developed in-house! It can be set up with an automatic transport device.
We would like to introduce our cleanroom internal equipment, the "Vertical Fully Automatic Reticle Stocker." To prevent impact during case entry and exit, the shelf supports are made of Delrin resin molded products. It is equipped with a built-in computer, allowing for a wealth of proprietary software. Additionally, it employs our own developed Class 1 compliant multi-joint arm robot (featuring ultra-low dust generation mechanisms, absolute value control servo motors, and position correction with a CCD camera, enabling variety management). 【Features】 ■ An ULPA filter is installed at the front of the shelf, and reticle cases are stocked directly beneath the filter. ■ The reticle cases can accommodate 6-inch Nikon and Canon models, as well as 5-inch reticle cases and other special cases like SMIF cases. ■ To prevent impact during case entry and exit, the shelf supports are made of Delrin resin molded products. ■ It can be set up with an automatic transport device, and manual or AGV devices can also be used for entry and exit. ■ With a built-in computer, it offers a wealth of proprietary software. *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Partial)】 ■Cleanliness ・Reticle storage area: ISO Class 4 (Class 10) ・Reticle transfer area: ISO Class 4 (Class 10) ■Dust collection element (Main filter): ULPA filter ■Dust collection efficiency: 99.999% or higher for 0.1μm particles ■Airflow rate: Approximately 100m3/min *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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As the only clean air system specialized manufacturer in Japan, we provide a comprehensive range of products and highly specialized technical expertise to offer clean-related products globally. - Reliable technical capabilities based on years of experience and a two-year domestic warranty. - You can also trust us for global support! - We have a wide variety of products to meet diverse industries and needs.