The shelf brackets are made of Delrin resin molded products! Since it has a built-in computer, there is a wealth of self-developed software.
We would like to introduce our cleanroom internal equipment, the "Horizontal Fully Automatic Reticle Stocker." It employs a self-developed class 1 compliant multi-joint arm robot (with ultra-low dust generation mechanism, absolute value control servo motor, position correction using CCD camera, and variety management capabilities). Additionally, the reticle cases can accommodate not only 6-inch cases from Nikon and Canon but also 5-inch reticle cases and special cases such as SMIF cases. 【Features】 ■ An ULPA filter is installed at the front of the shelf, and the reticle cases are stocked directly under the filter. ■ To prevent impact during case entry and exit, the shelf supports are made of Delrin resin molded products. ■ It can be set up with an automatic transport system, and manual or AGV devices can also be used for entry and exit. ■ It has a built-in computer, allowing for a wealth of self-developed software. ■ It is also possible to link with the customer's host computer. *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Partial)】 ■Cleanliness ・Reticle storage area: ISO Class 3 (Class 1) ・Reticle transfer area: ISO Class 4 (Class 10) ■Dust collection element (Main filter): ULPA filter ■Dust collection efficiency: 99.999% or higher for 0.1μm particles ■Air processing volume: Approximately 160m3/min *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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As the only clean air system specialized manufacturer in Japan, we provide a comprehensive range of products and highly specialized technical expertise to offer clean-related products globally. - Reliable technical capabilities based on years of experience and a two-year domestic warranty. - You can also trust us for global support! - We have a wide variety of products to meet diverse industries and needs.
