Vertical Fully Automatic Reticle Stocker for Clean Room Internal Equipment

Adopting a Class 1 compliant multi-joint arm robot developed in-house! It can be set up with an automatic transport device.

We would like to introduce our cleanroom internal equipment, the "Vertical Fully Automatic Reticle Stocker." To prevent impact during case entry and exit, the shelf supports are made of Delrin resin molded products. It is equipped with a built-in computer, allowing for a wealth of proprietary software. Additionally, it employs our own developed Class 1 compliant multi-joint arm robot (featuring ultra-low dust generation mechanisms, absolute value control servo motors, and position correction with a CCD camera, enabling variety management). 【Features】 ■ An ULPA filter is installed at the front of the shelf, and reticle cases are stocked directly beneath the filter. ■ The reticle cases can accommodate 6-inch Nikon and Canon models, as well as 5-inch reticle cases and other special cases like SMIF cases. ■ To prevent impact during case entry and exit, the shelf supports are made of Delrin resin molded products. ■ It can be set up with an automatic transport device, and manual or AGV devices can also be used for entry and exit. ■ With a built-in computer, it offers a wealth of proprietary software. *For more details, please refer to the PDF document or feel free to contact us.

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