Nanomotion's ultrasonic motor achieves high-precision positioning, high-speed movement, and fine motion all in one. Custom-made options are also available to suit your equipment.
We design and manufacture high-speed movement, precise positioning, and vacuum-compatible stages using ultrasonic motors for applications such as prototyping and small-lot production for development purposes. Nanomotion's ultrasonic motors feature direct drive with no backlash. They can be used not only in the atmosphere but also in high vacuum, and non-magnetic models are available for MRI and ion beam applications. ■ Stage for Light Sheet Microscopy Achieves accuracy with a precision of 10nm and excellent speed uniformity. 5-axis with XYZ and Tip-Tilt. ■ 1nm Multi-Axis Precision Stage for Semiconductor Manufacturing Evaluation A 3-axis stage used within a vacuum chamber that has sub-nanometer step resolution using SE motors. Manufactured for semiconductor 7nm process development. ■ Multi-Axis Platform for Laser Communication for Low Earth Orbit Satellites Cancels the constant vibrations of satellites using ultrasonic motor stages, enabling laser communication with Earth. *For other examples, please refer to the "Examples of Achievements" section below. Additionally, Nanomotion's ultrasonic motors can be widely used in medical devices, spectrometers, optical alignment, analytical instruments, and more. We assist with prototyping and development.
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basic information
【Main Ultrasonic Features】 ■ HR Motor (Standard Type) Speed range of 1μm to 250mm/sec, step resolution of 1nm, maximum driving force of 32N ■ SE Motor (Latest Type) Speed range of 1μm to 500mm/sec, sub-nm step resolution, maximum driving force of 32N ■ EDGE Motor (Compact and Lightweight) Maximum speed of 120mm/sec, step resolution of 100nm, driving force of 300mN, mass of 0.55g
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Estimates will be provided on a case-by-case basis for custom products.
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Applications/Examples of results
【Representative Stage Prototype and Development Examples (Domestic and International)】 ○ Multi-axis platform for laser communication with low Earth orbit satellites ○ Stage for atomic force microscopy ○ Precision rotating stage for synchrotron facilities ○ 4-axis (X-Y-Z-T) stage for ion beam (FIB) inspection ○ 1nm multi-axis precision stage for semiconductor manufacturing evaluation ○ 5-axis low-speed motion stage for cell imaging ○ Autofocus module considering SWaP ○ Miniature gimbal for cameras mounted on drones ○ Drive module for lenses used in wafer inspection
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Company information
A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.