For in-situ film thickness monitoring during etching of through membranes and film deposition! Spot size 100μm.
The "SLI 670" is an endpoint monitor for plasma devices with wavelengths of 670/980nm. A laser beam is emitted from the window at the top of the plasma device, measuring the reflected light from the sample to determine the film thickness. Please feel free to consult us when you need assistance. 【Features】 ■ Wavelength: 670/980nm ■ Spot size: 100μm ■ Motor-driven stage ■ Reflectivity, interference mode *For more details, please refer to the PDF document or feel free to contact us.
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