Can be installed in the same chamber! Reduces cross-contamination through multi-zone configuration.
The "ATMOS-R2R Series" is a roll-to-roll device. It performs surface treatment and film formation on various types of flexible films, reducing cross-contamination through multi-zone configuration within the same chamber. Various deposition sources and treatment sources can be installed in the same chamber, providing high compatibility through the integration of the FLOCON series gas, vapor, and liquid control systems. 【Features】 ■ Surface treatment and film formation on various types of flexible films ■ Reduction of cross-contamination through multi-zone configuration within the same chamber *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Various film-forming sources and treatment sources can be installed in the same chamber. ■ High compatibility due to the integration of gas, vapor, and liquid control systems in the FLOCON series. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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