Semiconductor manufacturing equipment, high heat-resistant anodizing, high corrosion resistance, particle countermeasures.
Kunimite is a high heat-resistant anodized coating that does not crack even when heated to 500°C.
Using Kunimite in semiconductor manufacturing equipment: 1. No cracks occur even when heated to over 350°C. 2. No particles are generated due to cracks. 3. No corrosion occurs from cracks. 4. A 50μm thick film shows excellent corrosion resistance against physical etching by plasma. 5. The gas release rate is ten times faster than that of typical anodized coatings, quickly reaching the processing vacuum environment. 【Features of Kunimite】 - Reduction of particles - Crack-free coating - Fast reach to processing vacuum levels - Shortened processing time - Long product lifespan with a 50μm thick film *For more details, please refer to the PDF document or feel free to contact us. *Currently, a patent is pending.
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basic information
Kunimaito solves the problems faced by next-generation semiconductor devices. Resolves particle generation Shortens processing time to eliminate time loss Has a long product lifespan, addressing maintenance issues of the device
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
Detailed information
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The high heat-resistant anodized processing of Kunimite for semiconductor manufacturing equipment: 1. Since cracks do not occur, particles are also not generated. 2. Therefore, there is no corrosion that would normally arise from cracks. 3. It has high corrosion resistance against plasma and gas, which suppresses the generation of particles. 4. Even against physical etching by plasma, a film thickness of 50μm protects against corrosion for a long time. Thus, aluminum processed with Kunimite can be used for components in high-temperature environments. 【Features】 ■ Effective in reducing particle quantity ■ No occurrence of cracks due to heat ■ No particle generation even after long-term use in plasma etching equipment *For more details, please refer to the PDF document or feel free to contact us. *Currently, a patent is pending.
Company information
China Electric Chemical Industry Co., Ltd. is a global company based in Yamaguchi that challenges future technologies. We perform metal surface treatments, including anodizing. With our unique technology, we specialize in surface treatment of aluminum used in semiconductor manufacturing equipment. We are always conscious of carbon neutrality, strive to prevent pollution, and work hard to protect and preserve the global environment.
