We offer stages equipped with a maximum resolution of 1nm and stages that achieve a repeatability of ±20nm. Custom solutions are available starting from one unit.
In the semiconductor field, where product miniaturization is advancing, and in optical fields such as silicon photonics, the demand for positioning accuracy is increasingly high. Achieving ultra-precise positioning on the nanometer scale requires a perfect match between mechanisms and control. Our company has over 20 years of experience as a specialized manufacturer of products suitable for ultra-precise positioning, known as "piezo stages," and we offer a rich lineup of catalog standard products. Furthermore, we actively support custom designs, allowing us to provide products tailored to specific applications when selection from standard products is challenging. 【Product Lineup】 ＜Ultra-Precise Piezo Stages＞ ■ Capable of ultra-precise position control with a maximum resolution of 1nm and high-speed response in areas smaller than 800μm ■ A wide variety of types available, including tilt for mirrors and focus for objectives ＜Precision Piezo Motor Stages＞ ■ Achieves reliable position control with ±20nm repeatability over a travel range of up to 25mm ■ Maintains position through self-locking even when the power is off *For more details, please refer to the materials. Feel free to contact us with any inquiries.
Inquire About This Product
basic information
We can respond to such needs: - I want to change the size of the stage body to avoid interference with the surrounding area. - I want to make fine adjustments to heavy objects. - I want to use it in special environments such as vacuum or non-magnetic conditions. - I need a product that is lightweight and has a fast response time. - I need a stage with a large opening for panels and wafers. We can custom design and manufacture precision and ultra-precision positioning equipment optimized for your specifications and purposes, starting from one unit. As a domestic manufacturer, we will respond quickly to detailed requests. In the fields of photonics research and development, as well as FPD/semiconductor manufacturing inspection equipment and scientific analysis instruments, if you have challenges related to "precision to ultra-precision positioning" that play an important role in improving inspection, measurement performance, and productivity, please feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
*For more details, please refer to the materials. Feel free to contact us as well.*
catalog（3）
Download All Catalogs
Company information
Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.