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  6. Optimal for cooling etching equipment: Apiste's Chiller PCU Series

Optimal for cooling etching equipment: Apiste's Chiller PCU Series

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last updated:Mar 12, 2026

アピステ
アピステ
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The Apiste chillers are available in three series: non-Freon, high durability, and ultra-wide range! You can choose the optimal chiller according to your application.

【Optimal for Cooling Etching Equipment】 It enables high-precision temperature control of the stage and stable supply of cooling water to the heat source lamp. This minimizes variability between lots and improves quality. -------------------------------------------------- 【Three Series of Chillers to Choose From】 1. PCU-NE Series: Uses non-Freon refrigerants and is not subject to the Freon Emission Control Law. 2. PCU-SL Series: Achieves high durability for safe use even in harsh field environments. 3. PCU-R Series: Realizes a wide temperature control range of -10 to 80°C and ultra-high precision water temperature management of ±0.05°C. 【Features】 ■ Drive recorder and time calendar function (PCU-NE) ■ Temperature control using external temperature sensors (PCU-NE/R) ■ Easy water supply work with a large-diameter tank (PCU-NE) ■ Reliable cooling performance ■ Standard Ethernet equipped to meet a wide range of communication needs!

    Chiller
エッチング装置.png

Optimal for cooling etching equipment: Apiste's Chiller PCU Series

エッチング装置.png
エッチング装置.png
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★Information on Related Seminars★ Apiste is currently holding free online seminars. Please take a look at the links below. - Three Key Points for Introducing Chillers - Five Cooling Methods for Introducing Chillers

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【Case Studies】 ■ Mold Cooling ■ Semiconductor Manufacturing Equipment ■ Laser Processing Machine ■ Cooling of Vacuum Pumps ■ Spot Welding Machine ■ Arc Welding Machine ■ High-Frequency Induction Heating Device ■ Concentrator

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Chiller PCU Series Comprehensive Catalog

Chiller PCU Series Comprehensive Catalog

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"Apice," which means "peak" in Spanish. That peak represents "technology" = robust development capabilities, "product" = unmatched high quality, "sincerity" = human service. This spirit, depicted in the clear blue sky, has taken shape in reality, becoming distinctly outlined. And, looking further ahead. What lies in our vision is already the blue sky of the future. Aiming for a new peak.

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