Bulk formation technology of 'fine resist patterns' for surface modification [University of Electro-Communications]

It is possible to form micro-patterns on diverse surface shapes in a wide range, at high speed, and at low cost.

In functionalization through surface modification, there is a technology that forms fine patterns on the surface of the workpiece using high-energy lasers or machining. While these methods have the advantage of being able to produce highly precise patterns, they face challenges such as the high cost of equipment and the difficulty of processing three-dimensional objects. This technology enables the formation of fine patterns on three-dimensional objects in a simple and cost-effective manner by applying the optical property of speckle to lithography. Features of the new technology: - Fine processing technology utilizing speckle light - Formation of fine dot-like random resist patterns on the surface of parts (approximately a few to several hundred micrometers) - Ability to form patterns collectively on the circumferential surface of cylindrical parts - Ability to form patterns collectively on the surfaces of parts with steps (step surfaces of several tens of millimeters) The resist patterns formed by this technology are expected to provide functionality to the surface of the workpiece. (Improvements in water repellency, hydrophilicity, dirt resistance, lubricity, anti-reflection, antibacterial properties, and biocompatibility, etc.)

Other surface treatment equipment