Wafer Sense - Measurement sensor for improving manufacturing equipment by Cyber Optics.
CyberOptics WaferSense ReticleSense
The wafer sensor is a suitable measuring instrument for equipment improvement. It allows for objective measurements and enables easy acquisition of numerical parameters that indicate improvement effects.
WaferSense, developed by CyberOptics, is a convenient measurement tool that efficiently adjusts process equipment. It enables high-precision equipment setup based on objective and reliable data. With its wafer-like shape and wireless capability, it can be used in a vacuum, allowing anyone to easily achieve reproducible results. There are five types: camera wafers for robot teaching, gap measurement wafers for showerhead adjustments, leveling measurement wafers for various equipment, vibration measurement wafers, and particle measurement wafers for monitoring particles inside the equipment. Using the included software, wireless communication with the sensors is possible, allowing for real-time LOG data acquisition and feedback. Utilizing WaferSense also aids in the standardization, comparison, and analysis of equipment parameters.
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basic information
◆ Auto Leveling System 2 (ALS2) Accelerates real-time vibration and leveling measurements. Quickly verifies equipment and improves equipment uptime. ◆ Auto Teaching System (ATS2) Arranged similarly to wafers, it measures the position coordinate data (XYZ) of wafers with high precision. ◆ Auto Gap Measurement System (AGS) Achieves parallelism adjustment through vacuum-compatible non-contact gap measurement that can be used in semiconductor process chambers such as PECVD, dry etching, and sputtering equipment. ◆ Auto Vibration System (AVS) Can automatically transport within process equipment to measure 3-axis acceleration and vibration. ◆ Airborne Particle Sensor (APS) Efficiently troubleshoots semiconductor process equipment and automated transport systems by quickly detecting airborne particles from 0.14um. It allows real-time verification of internal cleanliness without opening the equipment, preventing exposure of the process environment to maintenance conditions. ◆ Auto Multi-Sensor (AMS) A multi-sensor that combines vibration, level, and humidity into one package for speedy adjustments.
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Applications/Examples of results
Used for wafer positioning, leveling, spacing adjustment, acceleration & vibration, and particle measurement in semiconductor process equipment. Can be used in a vacuum. Real-time data acquisition is possible. Various data can be quantified and logged.
Company information
Since our establishment in 1946, we have expanded our activities from the sale of rice to the sale of petroleum products tailored to customer needs, and into the semiconductor industry. In September 2005, we enhanced our logistics center by expanding our warehouse, focusing on logistics issues such as quality and delivery management capabilities, cost responsiveness, lead time reduction, and environmental considerations on a global scale. We are committed to contributing to the vibrant industrial development of Oita in the future. As the information age accelerates, we will continue to read the times, listen closely to your voices, and strive for further leaps forward through ongoing challenges.
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