Numerous achievements in the LCD industry, improving yield and maintenance, bacteria sterilization device.
Over 200 units of proven performance in the LCD industry! This is a bacteria removal device developed for clean rooms.
This device can reliably remove bacteria in manufacturing lines that use pure water in clean rooms, contributing to improved yield and maintenance. By simultaneously utilizing ozone (O3) and ultraviolet (UV) photocatalysts, it decomposes bacteria and organic matter through advanced oxidation processes (AOP). Unlike chemical disinfection, it does not generate resistant bacteria. 【Features】 ■ Removes bacteria in a short time ■ Does not generate resistant bacteria ■ Removes biofilms due to powerful disinfection performance ■ No need for chemical cleaning during PM ■ No need for chemical purchase/recovery/device shutdown ■ By installing it on the downstream side of multiple circulating tanks, it also has an effect on the upstream tank.
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Applications/Examples of results
【Achievements】 ■ Cleaning before resist application ■ Cleaning before film formation ■ Water washing after peeling ■ Water washing after development *Please feel free to contact us.
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The SCREEN Group has celebrated its 80th anniversary. Since its establishment in 1943, we have received tremendous support from all of you, and on October 11, 2023, the SCREEN Group marked its 80th anniversary. We sincerely thank you. With the spirit of continuing to challenge creativity and development, we will continue to evolve.