It prevents contamination adhesion and cleans while drawing and observing with electron beam drawing, inspection, and SEM equipment.
PARAM manufactures and sells "Ozone Supply and Decontamination Equipment for Vacuum Use." The "supply device" can accurately introduce trace amounts of ozone into a vacuum. There is no need to stop the equipment for cleaning. Additionally, the "decontamination device" is compact, has high conductance, and generates minimal particles. For more details, please feel free to contact us. 【Features】 <Ozone Gas Supply Unit for EB Equipment> ■ Generates high-concentration ozone without particle generation and is nitrogen-free ■ Accurately introduces trace amounts of ozone gas into the equipment ■ No need to stop the equipment for cleaning ■ Low noise and can be installed near EB equipment *For more information, please refer to the PDF materials or feel free to contact us.
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【Features】 <Ozone Decomposition Device for Vacuum OZ-1000> ■Compact ■Successfully enhanced ozone treatment capacity ■Two models available according to application *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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PARAM Corporation is a company engaged in the development, manufacturing, and consulting of ultra-fast electron beam drawing technology and essential technologies. Through the development of core technologies such as multi-column technology using permanent magnets, high-brightness uniform irradiation long-life electron guns, and programmable shape-variable beams (PSB), we contribute to the advancement of society through device development and manufacturing.