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  6. Semiconductor manufacturing equipment - coupling for chiller cooling piping [fluid connector]

Semiconductor manufacturing equipment - coupling for chiller cooling piping [fluid connector]

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last updated:Sep 17, 2025

ストーブリ
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Non-spill coupling with no liquid dripping during attachment and detachment: Ideal for connecting cooling pipes in semiconductor manufacturing equipment and chiller systems!

In semiconductor manufacturing processes, where high productivity and reliability are required, flexible maintenance of various equipment and efficient temperature control are essential, necessitating high-performance and reliable quick couplings. At Stäubli, we offer a variety of non-spill quick couplings for fluids that can be used in various applications within the semiconductor manufacturing process, including testing equipment and chiller units. Stäubli's technological expertise ensures reliable sealing in cooling circuits. Connectors with a flat face design minimize liquid drippage, enabling safe connection and disconnection throughout the entire process.

    Pipe Fittings
MCB-range-staubli.jpg

Semiconductor manufacturing equipment - coupling for chiller cooling piping [fluid connector]

MCB-range-staubli.jpg
MCB-range-staubli.jpg MCB-staubli-v1.jpg MCB-staubli-v2.jpg
  • Clean break quick release couplings for thermal management
  • Special site - Product/service details - https://pr.mono.ipros.com/staubli/product/

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basic information

We offer two types of solutions tailored to your needs: ■ Mono coupling for one-on-one one-touch direct connection (manual connection) ■ Rack-mounted coupling for simultaneous connection of multiple circuits (blind mate specification with alignment correction) 【Features】 ● Almost no liquid dripping during attachment and detachment, protecting the operator and the work environment ● Compact design that is easy to operate even in limited spaces and can be easily integrated into existing equipment ● We also have special products available for use with various fluids, from low to high temperatures ◇ High-function thermal media for high temperatures (up to 250°C) ◇ Refrigerants for extremely low temperatures (down to minus 100°C) Please contact us for more details.

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Applications/Examples of results

- Cooling system for semiconductor manufacturing equipment - Piping connections for chillers, pumps, heat exchangers, etc. - Water cooling circuit for semiconductor testing equipment - Cooling circuits for various electronic devices

Detailed information

  • MCB-range-staubli.jpg

    Stainless Steel Non-Spill Coupling "MCB" High-performance coupling with non-spill structure and automatic ball lock Main body material: SUS316L Seal materials: NBR, FKM, EPDM, FFKM, FMQ Diameter: 03mm, 05mm, 08mm, 12mm, 16mm Pressure range: 50-100 bar (varies by size)

  • DAG

    Stainless Steel Non-Spill Coupling "DAG" A high-performance coupling with a non-spill structure and automatic ball lock. Body material: SUS304 Seal material: EPDM Diameter: 03mm, 06mm, 09mm Pressure range: 16 bar

  • hcb-anti-pollution-series-316.thumb.800.480.jpg

    Bayonet-type non-spill coupling "HCB" High-performance coupling with a non-spill structure and bayonet lock. Main body material: SUS316L Seal materials: NBR, FKM, EPDM, FFKM, FMQ Diameter: 03mm, 05mm, 08mm, 12mm, 16mm, 20mm Pressure range: 50 to 350 bar (varies by size)

  • CGD

    Automatic Centering Blind Mate Specification Non-Spill Coupling 'CGD' Body Material: Aluminum Alloy (Hard Anodized Treatment) Seal Material: FKM, EPDM, FMQ Diameter: 03mm, 05mm, 08mm, 12mm Pressure Range: 16 bar Alignment Correction: ±1mm *There is also a stainless steel version 'DDG' Diameter: 03mm, 06mm, 15mm

catalog(4)

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Stoberi Coupling General Information [Fluid Connector]

Stoberi Coupling General Information [Fluid Connector]

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Non-spill quick coupling 'DAG' for water cooling of electronic devices, with no liquid drips during attachment and detachment [Fluid Connector].

Non-spill quick coupling 'DAG' for water cooling of electronic devices, with no liquid drips during attachment and detachment [Fluid Connector].

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Water cooling circuit automatic centering blind mate specification non-spill coupling 'CGD' [Fluid Connector]

Water cooling circuit automatic centering blind mate specification non-spill coupling 'CGD' [Fluid Connector]

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"Industry-Specific Solutions" Non-Spill Quick Couplings for Cooling Piping in Semiconductor Manufacturing Equipment [Fluid Connectors]

"Industry-Specific Solutions" Non-Spill Quick Couplings for Cooling Piping in Semiconductor Manufacturing Equipment [Fluid Connectors]

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Company information

ストーブリ

ストーブリ

Industrial Machinery

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Stäubli has four business divisions: electrical connectors, fluid connectors, industrial robots, and textile machinery. Based on our exceptional expertise and years of accumulated know-how, we provide mechatronics solutions to various industrial sectors. Founded in 1892 as a small textile machinery repair shop near Zurich, Switzerland, Stäubli has grown into a global company operating in 28 countries and having sales partners/agents in 50 countries across four continents. In 1983, Stäubli Corporation was established in Osaka as a unit for business in Japan. We have a showroom in Nishi-Tenma (Osaka), so please feel free to visit us (by appointment only).

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