EBSD main analysis method

basic information

EBSD stands for Electron Backscatter Diffraction, a method for observing the microscopic crystal structure of materials using a scanning electron microscope. When an electron beam is directed at a crystalline sample, the electrons undergo inelastic scattering and are diffracted at the crystal lattice planes, being emitted as backscattered electrons that carry a diffraction pattern known as a Kikuchi pattern. By indexing the orientations in this Kikuchi pattern, the crystal orientation can be determined. The Inverse Pole Figure (IPF) map is a map that indicates crystal orientations and is applied to confirm the orientation states of individual crystal grains in rolled plates and magnets. The Kernel Average Misorientation (KAM) map is an analytical method that shows local orientation differences and is used to confirm the amount of strain caused by plastic deformation such as rolling. The Phase map is a map that distinguishes phases from the Kikuchi pattern and colors them according to each phase, applied to identify residual austenite in martensite. The Pole Figure (PF) is a stereographic projection diagram that shows the orientation of specific crystal orientations relative to the sample coordinate system.

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Applications/Examples of results

Evaluation of the crystal structure and crystal orientation of materials.