Directly embedded temperature sensors in the wafer enable direct in-situ wafer temperature measurement.
The sensors are highly reliable and are placed directly on the measured wafer, allowing them to provide the actual temperature at the exact location where they are positioned. They can also accurately measure the temperature profile of the wafer and continuously monitor the temperature changes throughout the complete thermal cycle, including transient states such as ramping up, cooling down, and delay periods.
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basic information
【Certification】 ■ ILAC / ANAB Certification Services ■ ISO9001 & ISO17025 【Specifications】 ■ Wafer Size: 2”~12” & Custom Wafer ■ Temperature Range: -200°C ~1200°C ■ Line Accuracy: ± 1.1 C or ±0.4% (K type) or less ■ Number of Sensors: 1 ~34 Points ■ Insulation: Silica Sleeve, Quartz Micro Tubing ■ Connector: 2 Pin Mini Plug & D-Sub
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Applications/Examples of results
【Applications】 ■ RTP ■ Reflow ■ Oven ■ CVD ■ Hot Plate ■ PVD ■ Sputtering ■ Other Applications
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Company information
We offer proposals for semiconductor manufacturing equipment and its components, tailored to customer needs from new to used items. In addition to importing and selling as an authorized distributor for overseas manufacturers, we also provide refurbished products with warranty and after-sales service. Furthermore, we can handle the purchase of excess equipment as well as relocation and removal. Our staff resides in the area, so please consult us for support overseas, particularly in Asia. We leverage our experience to comprehensively support your production operations.