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  6. High Cost Performance: Capacitance Gauge / Cold Cathode Pirani Gauge

High Cost Performance: Capacitance Gauge / Cold Cathode Pirani Gauge

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last updated:Jun 18, 2024

キヤノンアネルバ 栗木本社
キヤノンアネルバ 栗木本社
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A vacuum gauge suitable for various vacuum systems.

The "Capacitance Gauge" is a temperature-compensated diaphragm vacuum gauge that can measure absolute pressure with high precision and stability. It features excellent zero-point stability, low temperature dependence, and outstanding vibration resistance. The "Cold Cathode Pirani Gauge" is a combination gauge that combines a robust cold cathode gauge (cold cathode ionization vacuum gauge) and a Pirani gauge, offering a wide pressure measurement range from atmospheric pressure to high vacuum. For more details, please refer to the PDF document or feel free to contact us.

    Other measurement, recording and measuring instruments
キャパシタンスゲージ1.PNG

High Cost Performance: Capacitance Gauge / Cold Cathode Pirani Gauge

キャパシタンスゲージ1.PNG
キャパシタンスゲージ1.PNG キャパシタンスゲージ2.PNG
  • Related Link - https://anelva.canon/
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【Features of the Capacitance Gauge】 ■ High precision and stable pressure measurement ■ Lightweight and compact with a mass of 200g and dimensions of W46mm × H49mm × L106mm ■ Power consumption of 0.5W 【Features of the Cold Cathode Pirani Gauge】 ■ Capable of stable pressure measurement across a wide pressure range from atmospheric pressure to high vacuum with a single unit ■ Dual functionality in one unit reduces costs ■ Utilizes a unique optical trigger mechanism to minimize measurement interruptions ■ Compatible with a wide range of processes ■ Maintenance-friendly with low running costs ■ Maintenance involves only parts replacement *For more details, please refer to the PDF document or feel free to contact us.*

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キヤノンアネルバ

キヤノンアネルバ 栗木本社

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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.

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