Piezo-driven electric Z-axis stage compatible with 300mm wafer observation
The WP-Z-120A is a Z stage with a millisecond drive speed, making it ideal for applications that require high-speed observation and processing. Designed for observing 300mm wafers, it has a load capacity of 8kg, allowing for the placement of heavy wafer chucks. Developed by Queensgate, which has continuously pursued faster and more precise control of piezo, this high-precision piezo product achieves smooth and stable operation across its entire 120-micron range, along with ultra-fast drive and convergence.
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basic information
■Motion range: 120μm ■Load capacity: 8kg ■Customizable (vacuum compatible, ultra-high vacuum compatible, high load capacity, long motion, etc.)
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Company information
Prior Scientific has been involved in the development and manufacturing of high-precision optical instruments and equipment that achieve precise operations for over 100 years since its establishment. We strive to remain a leading company in the field of optical systems, developing high-precision automation equipment and related products on a daily basis. Our manufacturing facilities in the UK headquarters and the US branch have both obtained ISO 9001:2015 certification and operate under strict quality control. The Prior Group, including sales offices in Germany, Japan, and China, is committed to continuing its business activities diligently to deliver high-precision products to customers around the world.