Win the intensifying competition! Introducing high-performance machines at low cost.
The "OVS-5120 Series" is a wafer appearance inspection device that sets wafers supplied from the load port onto an XYθ stage and performs critical defect detection using a high-speed, high-resolution color area camera. It ensures that good products are not mixed with defective ones by utilizing special lighting and software for stable defect detection. Additionally, it is equipped with unique learning software that absorbs variations between lots. 【Features】 ■ Incredible detection capability ■ Reproducibility ■ Strong adaptability in the field ■ Easy recipes for anyone ■ Low-cost/high-performance machine *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications】 ■Target Products: System LSI, Flash Memory, CMOS Devices, etc. ■Wafer Size: 12 inches ■Defect Items: Pattern defects, scratches, color unevenness, foreign substances, etc. ■Camera: 4 million pixels, color ■Lighting: Coaxial incident lighting, oblique ring lighting ■Inspection Magnification: 2.5x, 5x, 10x (with active autofocus) ■Resolution: 1.1μm/pixel (5x) ■Processing Capability: Approximately 2.5 minutes/(12 inches), 2.2 resolution ■Options: In-car, communication specifications ■Equipment Size: W1,600×D2,500×H1,800mm *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Okano Electric has upheld the philosophy of "meeting customer expectations through the power of technology" since its founding, walking alongside our customers. We will continue to accurately respond to customer needs and strive to provide consistently high-quality products, while also working to further enhance our technological capabilities. Additionally, we are committed to contributing to society by supporting the development of our customers. Okano Electric aims to be a company that lasts for 100 years and will continue to make strides in the next 50 years as well.
