ALIO's hybrid hexapod capable of ±30° tilt! 360° rotation is also possible! High rigidity long stroke hexapod stage.
ALIO Industries' patent technology. A new type of hexapod called "Hybrid Hexapod" that combines the degrees of freedom of parallel kinematics with the precision and rigidity of serial kinematics. Its significant feature is that, despite being a long-stroke hexapod, it achieves a repeatability precision of ±80nm even in the standard configuration. Compared to conventional systems, it offers major advantages of being compact, high-rigidity, long-stroke, and high-precision, enabling entirely new system designs for applications such as precision machining and precision alignment.
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basic information
■Long Stroke Parallel Kinematic Technically capable of meter stroke XY (standard even 400mm). The True nano stage boasts a stroke of Z: <205mm, θx, θy:<40°, θz: 360°. A lineup from small to large types is available in combination. ■User-Friendly Controller Method Kinematic calculations are embedded in the controller, allowing users to control via coordinate control. During operation, the rotation axis (TCP) can be set to any coordinate from the software, enabling highly flexible movements without stopping the operation. ■High-Performance Motors/Optical Encoders Adopted By using top-tier manufacturers from Europe and the U.S., not only precision but also high reliability is achieved. MTBF>100,000h. ■Various Stages Can Be Directly Assembled It is possible to directly mount over 400 types of stages without using adapter plates. This is a multi-axis stage system compliant with 6D Point Precision. ●For more details, please contact us or download the catalog.
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■ Manufacturing and sales of laser equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of electrical and electronic equipment and its application devices and parts, as well as import and export operations ■ Sales of optical equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of medical, physical, and measuring instruments and their application devices and parts, as well as import and export operations ■ Manufacturing and sales of adhesives, adhesive tapes, adhesive sheets, and their equipment and devices, as well as import and export operations ■ All operations incidental to the above items