High stability high precision hexapod stage KUBAN
Kuban is a highly stable 6DOF system designed to position elements in space with high precision and a resolution of 1.5 µrad. The configuration and integration of high-resolution actuators and high-precision spherical joints enable performance with high resolution and reproducibility, with a load capacity of up to 500 kg.
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basic information
XY Stroke ±75mm Z Stroke ±45mm Tilt <±5° Rotation (ZΘ) ±10° Repeatability (XYZ) XY±0.2μm Z±0.1μm Repeatability (Rx, Ry, Rz) RxRy±2.5μrad Rz±4μrad Size φ450mm Height (Z midpoint) 600mm Opening φ200mm Load Capacity 500kg ● For more details, please contact us or download the catalog.
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