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  5. Plasma surface treatment equipment
  6. Ultra High-Density Atmospheric Pressure Plasma ToughPlasma ATOM

Ultra High-Density Atmospheric Pressure Plasma ToughPlasma ATOM

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Tough Plasma ATOM

last updated:Jan 06, 2026

FUJI ロボットソリューション事業本部 新規事業部
FUJI ロボットソリューション事業本部 新規事業部
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Significant cost reduction, environmentally friendly Air model.

This is the latest model of the Tough Plasma series atmospheric pressure plasma unit. It enables plasma treatment using only compressed air and electricity, significantly reducing initial and running costs. Various parameters are optimized, and no unnecessary adjustments are required. If you are experiencing issues with adhesion failure, paint peeling, or surface dirt, please feel free to contact us.

    Plasma surface treatment equipment
ATOM.jpg

Ultra High-Density Atmospheric Pressure Plasma ToughPlasma ATOM

ATOM.jpg
ATOM.jpg
  • Related Link - https://www.fuji.co.jp/items/plasma/atom

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basic information

Tough Plasma is a remote atmospheric pressure plasma unit that combines the following features: ◆ High-density radicals It generates high-density radicals due to its unique internal structure. This enables high-speed surface treatment, providing high productivity and stability. ◆ Electrically neutral It does not cause electrical damage even to substrates equipped with IC chips and other components. ◆ Robot cable It uses a robot cable for the power line, contributing to the automation of production. ◆ Various self-monitoring functions By continuously monitoring various parameters such as discharge state and gas flow rate, it achieves high safety.

Price information

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Price range

P5

Delivery Time

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Applications/Examples of results

【Applications】 ■ Gas dry cleaning ■ Surface modification of films ■ Pre-treatment for plating and coating ■ Improvement of wettability on gold-plated surfaces ■ Cleaning of electronic components ■ Terminal cleaning of LCD substrates ■ Precision cleaning of optical components, molds, etc.

Line up(4)

Model number overview
ATOM This is an Air model that significantly reduces costs and is environmentally friendly.
FPF20-GM This is the top model of the overseas-compatible type that has obtained CE and MET marks.
FPF20-ST This is a standard type that boasts high cost performance.
FPB20 This is a low-temperature model suitable for processing thin films and thin samples.

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Ultra High Density Atmospheric Pressure Plasma Unit "Tough Plasma"

Ultra High Density Atmospheric Pressure Plasma Unit "Tough Plasma"

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Ultra High-Density Atmospheric Pressure Plasma Unit 'Tough Plasma ATOM'

Ultra High-Density Atmospheric Pressure Plasma Unit 'Tough Plasma ATOM'

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Company information

FUJI

FUJI ロボットソリューション事業本部 新規事業部

Industrial Machinery

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FUJI Corporation is an industrial machinery manufacturer headquartered in Chiryu City, Aichi Prefecture. Established in 1959 as a machine tool manufacturer, it has supported core industries such as automotive and electronics from the perspective of parts processing. Meanwhile, starting around 1978, it also began the development and manufacturing of surface mount devices for the electronics industry, and today it ships products not only within Japan but also to countries around the world.

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