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  6. Ultra High Density Atmospheric Pressure Plasma ToughPlasma FPF20-GM

Ultra High Density Atmospheric Pressure Plasma ToughPlasma FPF20-GM

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Tough Plasma FPF20-GM

last updated:Jan 06, 2026

FUJI ロボットソリューション事業本部 新規事業部
FUJI ロボットソリューション事業本部 新規事業部
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Atmospheric pressure plasma device that balances high processing capability and safety.

The FPF20-GM is a world-class atmospheric pressure plasma device capable of generating ultra-high-density radicals more than ten times that of conventional atmospheric pressure plasma. Various parameters are optimized, and no additional adjustments are necessary. You can easily utilize world-class atmospheric pressure plasma with the push of a button. It has obtained CE and MET marks, making it usable in EU member countries and North America. If you are experiencing issues with poor adhesion, paint peeling, or surface contamination, please feel free to contact us.

    Plasma surface treatment equipment
FPF20-GM.jpg

Ultra High Density Atmospheric Pressure Plasma ToughPlasma FPF20-GM

FPF20-GM.jpg
FPF20-GM.jpg
  • Related Link - https://www.fuji.co.jp/items/plasma/fpf20

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basic information

Tough Plasma is a remote atmospheric pressure plasma unit that combines the following features: ◆ High-density radicals Based on unique methods developed through joint research with Nagoya University, it generates high-density radicals. This enables high-speed surface treatment, providing high productivity and stability. ◆ Electrically neutral It does not cause electrical damage even to substrates equipped with IC chips and other components. ◆ Low-temperature treatment The irradiation gas temperature is low, making it safe to use even with low-melting-point resin materials. ◆ Robot cable It uses robot cables for power lines, contributing to the automation of production. ◆ Various self-monitoring functions By continuously monitoring various parameters such as discharge state and gas flow rate, it achieves high safety.

Price information

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Price range

P6

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Applications/Examples of results

【Applications】 ■ Gas dry cleaning ■ Surface modification of films ■ Pre-treatment for plating and coating ■ Improvement of wettability on gold-plated surfaces ■ Cleaning of electronic components ■ Terminal cleaning of LCD substrates ■ Precision cleaning of optical components, molds, etc. *For more details, please download the PDF or feel free to contact us.

Line up(4)

Model number overview
ATOM This is an Air model that significantly reduces costs and is environmentally friendly.
FPF20-GM This is the top model of the overseas-compatible series that has obtained CE and MET marks.
FPF20-ST This is a standard type that boasts high cost performance.
FPB20 This is a low-temperature model suitable for processing thin films and thin samples.

catalog(2)

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Ultra High Density Atmospheric Pressure Plasma Unit "Tough Plasma"

Ultra High Density Atmospheric Pressure Plasma Unit "Tough Plasma"

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Ultra High-Density Atmospheric Pressure Plasma Unit 'Tough Plasma ATOM'

Ultra High-Density Atmospheric Pressure Plasma Unit 'Tough Plasma ATOM'

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Company information

FUJI

FUJI ロボットソリューション事業本部 新規事業部

Industrial Machinery

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FUJI Corporation is an industrial machinery manufacturer headquartered in Chiryu City, Aichi Prefecture. Established in 1959 as a machine tool manufacturer, it has supported core industries such as automotive and electronics from the perspective of parts processing. Meanwhile, starting around 1978, it also began the development and manufacturing of surface mount devices for the electronics industry, and today it ships products not only within Japan but also to countries around the world.

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