Bilateral Microscope System "TOMOS-80XY"

Equipped with an 8-inch electric XY stage and autofocus function! Precisely controls movement to prevent measurement errors.

The "TOMOS-80XY" is a dual-sided microscope system that automatically moves to the specified measurement points of a workpiece and can automatically measure the misalignment of patterns and alignment marks on the front and back of MEMS and semiconductor wafers. It automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the misalignment between their center coordinates. It registers XYZ stage control conditions, measurement conditions, creates maps, and automatically measures multiple locations on the workpiece. Additionally, it is equipped with an alignment function to correct the misalignment of the XY stage and the workpiece mounting position, ensuring precise movement control and preventing measurement errors. [Software Features (Excerpt)] - Front and back optical axis correction - Front and back lens magnification correction - Camera mounting angle correction - Automatic measurement of front and back position misalignment - Electric stage control and map movement control *For more details, please download the PDF or feel free to contact us.

Other microscopes