A case where manual operations such as valve opening and closing in the vacuum drying process of the semiconductor industry can be controlled via a touch panel!
We would like to introduce our achievements in modifying the operation and control system of a "manual operation device" for the precision parts manufacturing industry. We added a PLC control system to enable manual operations such as valve opening and closing via a touch panel, and implemented various interlocks. The modifications included changing manual valves to pneumatic valves, adding a vacuum gauge, introducing interlocks related to exhaust, pressure, and gas, and implementing an automatic exhaust mode (from DP + TMP startup to chamber exhaust). 【Overview of Achievements】 ■ Modification Details - Modified manual operation parts such as valve opening and closing to be operable via a touch panel. - Introduced various interlocks made possible by the addition of the PLC. ■ Modification Areas - Changed manual valves to pneumatic valves and added a vacuum gauge. ■ Control/Operation: PLC/Touch Panel *For more details, please refer to the related links or feel free to contact us.
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We design and manufacture equipment tailored to our customers' needs, ranging from film deposition devices such as CVD, sputtering, and evaporation systems to experimental and production equipment for both vacuum and atmospheric pressure, including atmospheric plasma and heating/drying furnaces. Additionally, we produce DLC films using the plasma CVD method, which is a type of CVD. We can also create silicon-based films such as a-SiC and SiOx. Please feel free to contact us if you have any inquiries.