High-speed laser defect scanner compatible with photoluminescence mapping.
It has been developed to meet the needs for subsurface defect inspection and classification functions of silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials. A variety of wafer processing options are available, minimizing the cost per pass while providing best-in-class throughput and sensitivity, catering to both research and development and mass production.
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Applications/Examples of results
- FS / BS / Edge / Surface defects and contamination - AR / VR / MR materials and structures - Crystal defects in silicon carbide (SiC) substrates and epitaxial layers - Crystal defects in gallium nitride (GaN) wafers and epitaxial layers - Defectivity on the surface and subsurface of thick wafers/seed wafers - Wafer-based microLED/VCSEL/EE laser materials - Whole wafer and point stress mapping - Wafer chuck contamination - Haze detection and measurement - Warpage/warped wafer measurement - Thin film wafer inspection (including handling of film frames)
Company information
Nihon Laser, founded in 1968, is the oldest and largest specialized company in Japan for lasers and optical-related products, having grown alongside advancements in laser technology with the support of our customers as a pioneer in the laser trading industry. We allocate just over 10% of our workforce to engineers, making us a trading company with strong technical expertise. We provide excellent laser products and optical-related products from around the world, including the USA, UK, Germany, France, Switzerland, Denmark, and Lithuania. We have established agency agreements with top-class manufacturers in each country, and currently, we have about 50 overseas trading partners. Additionally, we can independently assemble laser-related equipment sourced from around the world and offer it as application systems. While we are a trading company, we also provide services akin to a fabless manufacturer. With gratitude for our customers' demands, we will continue to offer flexible and aggressive solutions.
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