Non-contact visualization of wafer residual stress, ideal for internal stress monitoring during process development and manufacturing.
The SIRD manufactured by TePla enables non-destructive, non-contact inline monitoring of sample stress fields. A sample subjected to stress exhibits birefringence due to the photoelastic effect. When polarized light passes through the area where birefringence occurs, changes in the polarization state take place. We evaluate the depolarization and transmission at this time to perform imaging of the stress distribution.
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basic information
◆General Specifications - Laser: Wavelength 1.3um, Spot size 100um - Scan mode: Maximum scan diameter r=152mm - Throughput: 10 sheets/hour 300mm (standard recipe measurement) - Facility: Input power 220V (50/60Hz), Compressed air 6BAR, 500L/h, Vacuum: <20kPa, 4000L/h *For more details, please contact us.
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Applications/Examples of results
✓ Epi growth ✓ Diffusion process ✓ RTP high-temperature process ✓ Wafer dicing ✓ Grinding, lapping ✓ Polishing
Company information
Hakuto Co., Ltd. is a trading company specializing in electronics and providing technical services as a technology trading company and a manufacturer of chemical industrial products, creating a rich future where people and technology coexist by identifying individual needs. Our company was established in November 1953 as a trading company engaged in the import and sale of quartz crystals. The name "Hakuto" is derived from the first character of "Brazil," the origin of quartz, and "Tokyo," representing the east. This name embodies our strong desire to grow as an international trading company that connects not only Brazil and Tokyo but also the wider world. 【Manufacturers/Products Listed on Ipros】 Asahi Kasei / Sensors, Hall elements, ICs Crystal IS / UVC (Deep Ultraviolet) LEDs IMPINJ / RAIN RFID devices, systems, software
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