Ideal for integration into semiconductor manufacturing inspection equipment! Silicone-free load cells.
In semiconductor manufacturing environments, equipment that does not generate siloxane from silicone resin is essential. UWR is a beam-type load cell that does not produce siloxane. Considering applications around silicon wafers, we use cables coated with fluororesin that do not generate chlorine gas.
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basic information
"Main Features" ○ Capacity: 2N, 10N ○ Aluminum alloy ○ Cable: φ2 4-core shielded fluororesin cable, 3m with a tapered end ● For more details, please contact us or refer to the catalog.
Price information
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Delivery Time
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Applications/Examples of results
○ Management of gripping force for wafer transport robots ○ Management of pressing force during wafer polishing ○ Load control for chip mounters ○ Management of pressing force during wire bonding ○ Measurement of adhesive force for gases, liquids, gels, etc.
Line up（2）
| Model number | overview |
|---|---|
| UWR-2N | Rated capacity 2N |
| UWR-10N | Rated capacity 10N |
catalog（1）
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Silicone-free beam-type load cell UWR
Company information
Unipulse Corporation is a sensor manufacturer. We develop a wide range of products using various technologies, including digital indicators for optimal load application in press-fitting and crimping, capacitive non-contact displacement meters, spindle clamping force measuring devices, small-diameter tool gripping force gauges, and rotating torque meters. In particular, the UTM series of rotating torque meters has become the standard for shaft-type torque measurement and is used in many development and manufacturing sites. In recent years, we have internalized the production of strain gauges and are manufacturing load cells and multi-force gauges in-house. Our subsidiary, Robotech, develops and sells products such as Uniservo (electric torque actuators) and Moonlifter (electric balancers). Notably, the electric balancer, which constantly detects force and position using load sensors and servo motors, allows for the movement of heavy objects with the sensitivity of human hands. We have received much positive feedback due to its unprecedented ease of use. Moving forward, the Unipulse Group will continue to prioritize research and development, delivering products that are first in Japan and the world.