Silent and highly reliable electromagnetic actuator for semiconductor manufacturing equipment

Compact, lightweight, and long-lasting! An electromagnetic actuator that combines heat resistance, low outgassing, quiet operation, and low dust generation, achieving stable operation even in special environments!

In semiconductor manufacturing equipment, high-precision positioning and quiet operation are extremely important factors. However, conventional solenoids produce significant operational noise and vibration, and there are issues such as dust generation and outgassing when used in cleanroom environments, making their implementation challenging. Our "SC Silent Solenoid" is a high-performance electromagnetic actuator developed to address these challenges. It operates quietly and with low vibration, minimizing outgassing and dust generation, and can maintain stable operation even in harsh environments such as vacuum, high temperature, and vibration. 【Application Scenarios】 ■ Semiconductor manufacturing equipment: Processes requiring high-precision positioning such as wafer transport, stage movement, and component placement. ■ Improved speed and responsiveness of equipment through weight reduction. ■ Utilization as a low-dust, low-outgassing drive component in cleanrooms. 【Benefits of Implementation】 ■ Maintenance of cleanroom environments: Reduced environmental impact due to low noise, low vibration, and low dust generation. ■ Improved yield: Stabilization of product quality through high-precision positioning. ■ Increased productivity: Efficiency in manufacturing processes achieved through high-speed, stable operation. ■ Reduced maintenance frequency and costs due to long-life design. ■ Robustness that ensures reliable operation even in harsh environments (vacuum, high temperature, vibration).

Solenoid Actuators