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  6. Substrate AOI "SX Series"

Substrate AOI "SX Series"

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SX5600, SX3600, SX1000

last updated:Dec 16, 2025

INSPEC Inc.
INSPEC Inc.
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From high-resolution pattern inspection at L/S = 5/5 µm to laser via inspection, we provide the optimal solution for all your visual inspection needs.

We offer a comprehensive lineup of AOI systems covering a wide range of substrates—from high-end models supporting minimum line/space widths of 5/5 µm to mid-range models. Our systems deliver ultra-high-precision inspection for everything from circuit patterns to laser vias. In addition to standard circuit and laser via inspection, our solutions are also capable of measuring and outputting line/space widths as well as top/bottom diameters of vias. 【Rich Options】 - Verify inspection results directly on a PC using defect images saved by the inspection system—no dedicated verification machine required. - Significantly reduce verification workload with AI-based automatic defect classification. - Analyze defect trends by type and location using panel-level data mapping, enabling effective feedback to upstream processes. - Offline teaching system allows recipe creation without occupying the inspection equipment. - Optional server system available for storing inspection results.

    Circuit Board Inspection Equipment
SX5600_E.png

Substrate AOI "SX Series"

SX5600_E.png
SX5600_E.png
  • Related Link - https://www.inspec21.com/inspection?category=1

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basic information

■Applicable Line/Space SX5600: 5μm/5μm~ SX3600: 10μm/10μm~ SX1000: 15μm/15μm~ ■Target Product Size SX5600: 600mm × 600mm SX3600: 600mm × 600mm SX1000: 300mm × 400mm

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Applications/Examples of results

In addition to standard printed circuit boards, we can customize according to customer requests, including frames and JEDEC tray inspections.

Detailed information

  • cpu.png

    Numerous achievements in high-end IC package substrates for CPUs, GPUs, and more.

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Model number overview
SX5600 High-end model compatible with minimum L/S=5/5μm
SX3600 Bestselling model with numerous achievements in laser via inspection
SX1000 Model ideal for inspecting sheet-type FPC and JEDEC trays with a compact body

Company information

INSPEC

INSPEC Inc.

Electronic Components and Semiconductors

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Inspec has developed and refined all the necessary optical sensing technology, image processing technology, mechatronics technology, precision machinery technology, and laser technology in-house as a manufacturer of inspection equipment, reaching a world-class level. Utilizing our proprietary technologies and the know-how accumulated over more than 40 years since our founding, we will continue to challenge the unseen tomorrow. You can trust Inspec with your circuit board inspection needs.

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