The suction surface glows like a backlight.
This is a porous chuck that adds a light-emitting function by incorporating a light source. It features a function that allows the adsorption surface to emit light like a backlight, enabling "adsorption fixation + light emission."
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basic information
- Corresponds to white, red, and blue light colors You can select your desired light color from the three available colors according to your inspection environment. - Supports rectangular shapes We propose an optimal shape for suction inspection of rectangular substrates and films. - Dimming supports external control Dimming can be externally controlled by connecting to a PC via LAN communication, etc. - Complies with CE standards We use light sources and power supplies that comply with the highly reliable CE standards for safety and reliability.
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Applications/Examples of results
- Internal pattern inspection of multi-layer wafers - Inspection of substrate edges and through holes - Edge detection during wafer transport can be used for applications such as these.
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We will shape "what you want" through conversations with our customers. Even if you cannot create a drawing, our staff will create the drawings while listening to your ideas. Our company has a comprehensive system in place from design to manufacturing and delivery.