Non-fluorinated chiller for semiconductor manufacturing equipment using natural refrigerant (CO2)
The "RJ-CA type" is a chiller for semiconductor manufacturing equipment that uses natural refrigerant (CO2). With a built-in ultra-compact canned pump and Ebara's inverter control technology, it enables space-saving and energy-saving features. Additionally, it allows for temperature control within ±0.1°C, contributing to improved process stability and yield. 【Features】 ■ Uses natural refrigerant (CO2) (GWP = 1) ■ Precise temperature control ■ Energy-saving ■ Space-saving *For more details, please download the PDF or feel free to contact us.
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The Ebara Corporation Fluid Machinery Company actively develops the sales and maintenance of pumps, blowers, and equipment and systems that form the foundation of social life and industry in a variety of fields, including office buildings, condominiums, factories, and various facilities, to support a safe and secure society and create a comfortable and prosperous living environment.