Established a method for high-precision component evaluation using sensitivity and quantification-focused SIMS (D-SIMS)!
The component evaluation of the wafer bevel area is generally conducted using TEM or TOF-SIMS; however, both of these methods have limitations in sensitivity and quantification, making it difficult to evaluate trace components. By using a newly developed dedicated fixture, we have established a method for high-precision component evaluation using sensitivity- and quantification-focused SIMS (D-SIMS). Please feel free to contact us when needed. 【Technical Overview】 ■ Fixed with a dedicated fixture to prevent positional shifts of samples in an unstable tilted state and to reduce detection stability issues. ■ Measurement positions can be selected with high precision and flexibility. *For more details, please download the PDF or feel free to contact us.
Inquire About This Product
basic information
For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please download the PDF or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Our company offers contract analysis services. Since our establishment in August 2002, we have utilized reliable analysis and measurement technologies along with state-of-the-art equipment to provide optimal nano-level microfabrication, analysis, evaluation of reliability, environmental safety chemical analysis, and service solutions for a wide range of markets centered around semiconductors, liquid crystals, metals, and new materials. Please feel free to contact us if you have any requests.