By using infrared heating, it is possible to heat only the sample, allowing for a lower background!
We would like to introduce our "Thermal Desorption Gas Analysis (TDS)." By understanding the gases emitted from materials and components, it is possible to confirm surface contaminants, verify process improvement measures, and estimate the causes of defects. In Thermal Desorption Gas Analysis (TDS), when the sample is heated in a vacuum, we can identify the types of gases emitted from the surface and interior (qualitative analysis) and perform semi-quantitative analysis of the gas volume. 【Features】 ■ Sample size: Up to 10mm x 10mm and 4mm (thickness) ■ Sample heating atmosphere: High vacuum (10^-7 Pa) ■ Temperature - Room temperature to 1,400℃ (sample stage temperature) - Room temperature to approximately 1,150℃ (Si substrate calibration temperature*) * High-precision temperature correction is performed using embedded thermocouples. * For more details, please download the PDF or feel free to contact us.
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【Other Features】 ■ Infrared heating allows for heating only the sample, enabling low background levels. ■ The SiC stage can accommodate samples that do not absorb infrared radiation. *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
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Our company offers contract analysis services. Since our establishment in August 2002, we have utilized reliable analysis and measurement technologies along with state-of-the-art equipment to provide optimal nano-level microfabrication, analysis, evaluation of reliability, environmental safety chemical analysis, and service solutions for a wide range of markets centered around semiconductors, liquid crystals, metals, and new materials. Please feel free to contact us if you have any requests.