Introducing examples of coatings for semiconductors and LCD components!
Introducing a case where damage and degradation of components (covering, thermal spraying on quartz, shower plate) inside the device caused by plasma were resolved!
In the semiconductor and liquid crystal industry, manufacturing is carried out in a clean environment, such as in the production lines for IC chips and liquid crystal panels. In such environments, manufacturing equipment is required to have properties like insulation and plasma resistance. Here, we introduce a case where ceramic thermal spraying solved these issues. ■Challenge Components (covering, thermal spraying on quartz, shower plates) within the equipment were damaged and deteriorated due to plasma. ■Proposal We proposed a coating that offers plasma resistance and contamination prevention. ■Effect The damage to components was reduced, their lifespan was extended, and the coating could be regenerated multiple times. This significantly lowered the costs of purchasing new components, which was greatly appreciated.
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basic information
【Types of Thermal Spraying by Nippon Coating Industry】 ■ Low-Pressure Thermal Spraying ■ Plasma Thermal Spraying ■ High-Velocity Flame Spraying ■ Arc Thermal Spraying ■ Thermal Spraying 【Materials Used for Thermal Spraying】 ■ Rod-Type Thermal Spraying Materials ■ Oxide-Based Thermal Spraying Materials ■ Carbide-Based Thermal Spraying Materials ■ Metal and Alloy Thermal Spraying Materials ■ Self-Fusing Alloy Thermal Spraying Materials
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Applications/Examples of results
**Achievements** ■ Chemical Plants: Shaft, sleeve, plunger, and mechanical seal sliding parts ■ Semiconductors & LCD: Covering, thermal spraying on quartz, shower plates ■ Steel & Metals: Wire drawing machine parts, flinger, rolling shafts ■ Film: SCR, RA, WC, OAT ■ Automotive: Piston head, hardened coils ■ Beverages: Filler machine parts, filler machine components, guides
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NCI introduced the core technology of the ceramic thermal spraying, the Low-Cry process, in Japan for the first time, and for half a century, it has supported rocket development. NCI has consistently pursued the Low-Cry process, leading and evolving ceramic thermal spraying. Thanks to the know-how of the Low-Cry process, it is possible to provide outstanding functions and quality, such as plasma, hybrid, high-speed flame, and surface patterns. NCI's thermal spraying technology is widely utilized in advanced technology fields, offering high-quality solutions unique to NCI.