Low failure rate and high reliability! An arc suppressor is available as an option.
We would like to introduce the "Film Formation (Sputtering) Power Supply" that we handle. The unit's output ranges from 1.5kW to 20kW, and it can support up to 300kW through master-slave operation. Additionally, it features high-speed interruption during arcing and low arc energy, with an optional arc suppressor available. 【Features】 ■ High reliability (low failure rate) ■ Optional arc suppressor available ■ High-speed interruption during arcing (interruption within 1us) ■ Low arc energy (less than 1mJ/kW) *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications】 ■ Output Voltage - 800V ■ Output Current - 40A *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Usage】 ■Power supply for semiconductor film deposition ■Power supply for sputtering *For more details, please download the PDF or feel free to contact us.
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Company information
Our company manufactures and sells power supply equipment, semiconductor devices, precision mechanical components, system equipment, and synthetic resin coatings. Leveraging our strengths through a five-business structure consisting of precision mechanical components, coatings, power supply devices, bonding/coating equipment, and power semiconductors, we engage in "proposal-based product development" that values communication with our customers. Additionally, through consulting and dialogue during the development process, we not only meet the functions requested by our customers but also provide new satisfaction with added value.