Measurement of 0.02μm particles in the liquid medication, compatible with hydrofluoric acid, inline and batch compatible.
●Minimum measurable particle size: 0.03 μm ●Particle size classifications can be set arbitrarily ●2 to 7 levels in the range of 0.02 to 0.08 μm (Factory settings: 4 levels of 0.02 μm or more, 0.03 μm or more, 0.04 μm or more, and 0.06 μm or more) ●Sapphire cell used
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basic information
Optical method: Side scattering method Light source: Semiconductor laser-excited solid laser Particle size range: 0.02 μm to 0.08 μm Rated flow rate: 10 mL/min Counting efficiency: 3% Maximum particle number concentration: 50,000 particles/mL (counting loss within 10%)
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Delivery of chemical supply plants for cutting-edge semiconductor manufacturing factories Chemical management for wet cleaning lines Manufacturing and shipping inspection lines of chemical manufacturers, etc.
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A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, and further expanding product fields centered on welfare and environmental issues, contribute to the enhancement of social welfare, safe living, and technological innovation through a long accumulation of technology and continuous challenges to new technologies.
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