0.05 μm, monitoring particle contamination in ultrapure water, directly connected to the pure water supply line, inline type.
Particle count monitoring for ultrapure water plants in semiconductor manufacturing facilities to keep the ultrapure water in the process line consistently clean.
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basic information
■ Measurement particle size range: 0.05 μm to 0.2 μm (simultaneous measurement of 10 particle sizes) ■ Measurement particle size can be arbitrarily set via the controller ■ Supports high pressure up to 500 kPa (gauge pressure) ■ Standard equipped with D/A converter (4-20 mA) and alarm output contacts
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Applications/Examples of results
Semiconductor manufacturing plant ultrapure water plant delivery Semiconductor manufacturing plant process line circulation system Semiconductor manufacturing plant cleaning tank circulation line
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Company information
A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, and further expanding product fields centered on welfare and environmental issues, contribute to the enhancement of social welfare, safe living, and technological innovation through a long accumulation of technology and continuous challenges to new technologies.
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