Achieving long-duration running! A cleaning liquid treatment unit equipped with deep ultraviolet LEDs for a dehydrated mercury-free society.
The "LEO Unit PT-0878LEO" is a high-power infrared (UV) LED cleaning unit that features a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates. It achieves long running times compared to mercury lamps. By combining deep ultraviolet light with ozone water, it generates highly efficient OH radicals, contributing to the breakdown of organic substances. This product is expected to be utilized in the medical and food sectors due to its high sterilization power against viruses and other pathogens. 【Features】 ■ Achieves a cleaning liquid processing unit equipped with deep ultraviolet LEDs for a mercury-free society ■ Achieves long running times compared to mercury lamps ■ Realizes a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates *For more details, please download the PDF or feel free to contact us.
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【Other Features】 ■ By combining deep ultraviolet light with ozone water, highly efficient OH radicals are generated, contributing to the treatment of organic substances. ■ As a characteristic of OH radicals, they have a high oxidation power and can react with and process organic substances and reducing agents. *For more details, please download the PDF or feel free to contact us.
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【Applications】 ■ Cleaning of silicon wafers, photomasks, LCD glass, magnetic disks, etc., cleaning after CMP, single wafer cleaning ■ Medical field, food industry *For more details, please download the PDF or feel free to contact us.
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Our company develops, designs, manufactures, and sells various equipment tailored to customer applications and manufacturing lines in the semiconductor, photomask, disk, and lens industries. We specialize in customized production based on customer specifications, providing total support for the product lifecycle from design, development, assembly, inspection, installation, to maintenance. By building close relationships with customers at every stage, we can directly sense the issues and technological trends they perceive, allowing us to quickly initiate development in response.