Automatic micro pump for liquid sample collection for semiconductor manufacturing.
Syringe Pump XLP6000
Contributes to maintaining purity in semiconductor manufacturing lines with a high-precision syringe pump.
In the semiconductor manufacturing industry, managing the purity of liquids, which significantly affects product quality, is extremely important. The presence of trace impurities can lead to a decline in product performance and a deterioration in yield. Our micropump eliminates the need for calibration and enables high-precision liquid sample extraction, supporting the maintenance of liquid purity in the manufacturing process. 【Usage Scenarios】 - Sample extraction in quality inspection processes - Chemical supply in semiconductor manufacturing lines - Supply of wafer cleaning solutions 【Benefits of Implementation】 - Maintains liquid purity, contributing to improved product quality - Enhances yield - Achieves a stable manufacturing process
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【Features】 - High resolution of 48,000 steps - Accuracy of 0.05% or less/full stroke - RS-232, RS-485, or CAN BUS interface - Compliant with RoHS3 - ISO13485 quality compliant 【Our Strengths】 Tecan has a long-standing track record in the manufacturing and development of life science research support equipment. We provide products tailored to our customers' needs and support quality improvement in semiconductor manufacturing.
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Applications/Examples of results
Factory equipment, analytical devices, in vitro diagnostic reagents, trace analysis, water quality testing, food testing, petroleum refining, semiconductor cleaning, etc.
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Company information
Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.
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