Graphite heater for semiconductor film formation

Graphite heaters supporting the film deposition process in semiconductor manufacturing.

In the semiconductor industry's film deposition process, precise temperature management is essential for the formation of high-quality thin films. In particular, a uniform temperature distribution in high-temperature environments and high durability are required. Inadequate temperature management can lead to a decline in thin film quality and a decrease in yield. Our graphite processing case, the heater (element) for high-temperature furnaces and vacuum furnaces, addresses these challenges by converting electrical energy into heat and raising the temperature inside the furnace. 【Usage Scenarios】 - CVD (Chemical Vapor Deposition) - PVD (Physical Vapor Deposition) - ALD (Atomic Layer Deposition) 【Benefits of Implementation】 - High-quality film deposition due to uniform temperature distribution - Stable operation due to high durability - Optimal size and shape through custom-made solutions

Processing Contract