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  5. Flaw detection testing
  6. Nanoindenter Technical Documentation: Micro Scratch Test

Nanoindenter Technical Documentation: Micro Scratch Test

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Nanovia Corporation Nano Indenter

last updated:Feb 04, 2026

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This is a PDF document on the micro-scratch test for silicon wafer coating agents. Please download it for details.

Polymer coatings are widely used in various industrial fields such as semiconductors, solar energy, optics, and biomedicine to enhance the mechanical properties, abrasion resistance, optical properties, and chemical properties of various substrates. The inherent quality of the coating and the compatibility at the interface of the coating/substrate system determine the durability and lifespan of the polymer coating. Scratch tests and micro-scratch tests have developed into one of the most widely applied methods for evaluating the cohesive strength and adhesive strength of coatings. The critical load at which a specific type of coating failure occurs as the applied load gradually increases is widely recognized as a reliable means to determine and compare the adhesive and cohesive properties of the coating. The most commonly used indenter in scratch tests is a conical Rockwell diamond indenter. However, when conducting scratch tests on soft polymer coatings deposited on brittle substrates like silicon wafers, the conical indenter tends to form grooves that scrape through the coating rather than causing cracks or delamination.

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Nanoindenter Technical Documentation: Micro Scratch Test

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A system that makes it possible to do everything with one device. Nanovia's nano/micro indenter (mechanical tester) accurately measures the micro to nano mechanical properties of a wide range of materials, from "thin films," "coatings," "ceramics," and "composites" to "polymers" and "biomaterials," through "scratch," "indentation," "abrasion," and "friction tests." All models are equipped with independent load sensors and depth sensors for true feedback load control, achieving unparalleled precision and the highest reproducibility available on the market.

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Micro-scratch test (indenter) on silicon wafer coating agents.

Micro-scratch test (indenter) on silicon wafer coating agents.

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Testing, Analysis and Measurement

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Our company handles products that are adopted by world-class companies. These products incorporate cutting-edge technologies not found in Japanese products, enabling the promotion of rationalization and cost reduction in manufacturing and development environments, and they are guaranteed to bring benefits to the companies that implement them. Additionally, we provide support for overseas products with the same rapid response as domestic manufacturers. ◎ Dynamic viscoelasticity measurement device ◎ Stress relaxation measurement device ◎ Drop weight impact testing machine ◎ Multicolor light 3D optical profiler ◎ Nano/micro indenter ◎ Tribometer ◎ Moisture meter for polymers ◎ Twin capillary rheometer for melt property material development ◎ Flow analysis software ◎ Molding analysis software ◎ Ultra-precision feeder ◎ Mass flow quantitative feeder ◎ Automatic adjustment weight-type blender ◎ Dehumidifying dryer for polymers ◎ Color spectrometer ◎ Equipment for shortening molding cycles ◎ Rubber measurement-related equipment  Dynamic measurement + vulcanization testing machine  Rheometer  Carbon dispersion meter  Mooney viscometer  Hardness and density meter  Density and specific gravity meter  Specific gravity meter for uncured rubber  Durometer  Durability and fatigue testing machine  Rebound tester  Wear testing machine ◎ Comprehensive valve manufacturer

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