Contributing to quality control in semiconductor manufacturing! Inline measurement of moisture in corrosive gases.
In the semiconductor industry, managing trace moisture during the manufacturing process significantly impacts product performance and reliability. Particularly in processes that use corrosive gases, accurate measurement of moisture is essential to maintain gas purity and improve product yield. The iTMA series measures moisture in corrosive gases inline, supporting quality control. 【Application Scenarios】 - Moisture management in corrosive gases during semiconductor manufacturing processes - Moisture monitoring in gas supply lines - Gas analysis in quality control departments 【Benefits of Implementation】 - Improved product yield - Stabilization of manufacturing processes - Increased efficiency in quality control
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【Features】 - Measures in the range of 0-2500 ppm with a maximum accuracy of ±1% - Achieves a price about 1/4 that of laser-type devices - The main unit can be selected from desktop type, 19" rack mount type, or portable type - Uses corrosion-resistant sensors, with options for the material of the housing, electrodes, and O-rings - Easy maintenance (just apply phosphoric acid regularly) 【Our Strengths】 As a domestic dew point meter manufacturer, we leverage our long-standing moisture measurement technology to provide products tailored to our customers' needs. We also offer calibration, inspection, and repair services, ensuring peace of mind for users even after installation.
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Applications/Examples of results
● Corrosive gas manufacturing process ● Management of corrosive gas purity in the semiconductor industry ● Chlorine drying equipment ● Moisture management in refrigerants ● Moisture management in medical oxygen gas ● Polyethylene manufacturing process ● Moisture management in heat treatment furnaces ● Moisture management in Ar and He during welding processes ● CO2 drying, dry ice manufacturing process
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.
