High-precision compact magnetic switches and sensors for semiconductor manufacturing
HS-320 High Precision 0.05μ Non-contact Precision Positioning Magnetic Sensor Makome Research Institute
Achieving high-precision positioning in wafer transport. Repeatability accuracy of ±0.05μm.
In the semiconductor manufacturing industry, particularly in wafer transport, high precision in positioning is required. Accurate positioning of wafers is a crucial factor that affects the quality and yield of the manufacturing process. Even slight misalignments can lead to product defects or performance degradation. Our compact magnetic switches and sensors achieve high-precision positioning in wafer transport with a repeatability of ±0.05μm. 【Application Scenarios】 - Position detection for wafer transport robots - Manufacturing equipment requiring precise positioning - Use in clean rooms 【Benefits of Implementation】 - Improved quality through high-precision positioning - Enhanced yield - Realization of a stable manufacturing process
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basic information
【Features】 - Repetition accuracy ±0.05μm - Protection structure IP67 - Compact design (Φ3mm) - Non-contact magnetic detection method - NPN/PNP transistor open collector output 【Our Strengths】 - Specialized manufacturer of magnetic sensors - Years of experience and know-how - Customization capabilities - Domestic development and manufacturing - 3-year warranty
Price range
P2
Delivery Time
P3
※It varies depending on the quantity, so please contact us for more information.
Applications/Examples of results
High-precision origin detection of machining centers For thermal expansion compensation of ultra-precision machining machines Origin detector for linear encoders Origin detectors for XY stages and rotary tables High-precision positioning
catalog（5）
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CAD data（10）
| Model number | overview | File |
|---|---|---|
| HS-321＋D-320 | High-precision positioning sensor for accurately detecting the center of the origin position PNP output |
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| HS-321＋D-320 | High-precision positioning sensor for accurately detecting the center of the origin position PNP output |
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| HS-320＋D-320 | High-precision positioning sensor for accurately detecting the center of the origin position, NPN output type. |
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| HS-320＋D-320 | High-precision positioning sensor for accurately detecting the center of the origin position, NPN output type. |
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| MG-210 | Magnetizing device for LS and FS |
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| MG-210 | Magnetizing device for LS and FS |
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| MG-220 | Magnetizing device for LS and FS |
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| MG-220 | Magnetizing device for LS and FS |
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| D-320 | Head holder for HS-320 and HS-321 |
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| D-320 | Head holder for HS-320 and HS-321 |
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Company information
Utilizing our original technology of saturable coils, we offer a fundamentally simple magnetic detection element technology that provides high precision and long-term stability even under adverse conditions. We have received strong support from a wide range of industries, including unmanned transport carts, industrial equipment, labor-saving machines, material handling, machine tools, injection molding machines, civil engineering and construction robots, food machinery, industrial machinery, nuclear facilities, and ships. We also excel in sensors for motorsports such as F1 and Moto GP, tilt meters for construction machinery, and magnetic sensors used for ultra-high precision measurements in scientific fields. Some of our products are also used in applications like multi-story parking and golf cart guidance sensors. All of our products are developed and manufactured 100% in Japan, with over 80% of our product lineup being custom-made based on individual customer requests. We have many custom options available, including waterproof, explosion-proof, heat-resistant, water-resistant, and radiation-resistant specifications. If you have any issues related to sensing or measurement, please feel free to consult us. IoT Platform: Our sales and technical staff are fully committed to addressing everything from minor customizations of existing products to proposing new detection principles. You can also rely on us for assistance with improvements. Our standard products come with a reassuring 3-year warranty. Location: Ina, Nagano Prefecture. Published on Ipros Monozukuri.
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