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  6. CMX Series for Semiconductor Testing

CMX Series for Semiconductor Testing

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Microscope Unit "CMX Series"

last updated:Feb 06, 2026

千代田光機
千代田光機
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A microscope unit suitable for exterior and interior inspection of wafers in FA applications.

In the semiconductor industry, the inspection process involves detecting minute defects and foreign substances on wafers, which is a critical issue that affects product quality and yield. Particularly, as manufacturing processes become more advanced, there is a demand for inspections with higher precision. The CMX series supports a wide range of wavelengths from visible light to short-wave infrared, enabling high-precision image acquisition for both external and internal inspections of wafers. 【Application Scenarios】 - External inspection of wafers - Foreign substance inspection inside wafers - Quality control of semiconductor devices 【Benefits of Implementation】 - Improved quality through high-precision inspections - Enhanced yield - Reduced inspection time

    Microscope
製品ダイジェスト(メイン)

CMX Series for Semiconductor Testing

製品ダイジェスト(メイン) - コピー.jpg
製品ダイジェスト(メイン) - コピー.jpg ?マイクロスコープユニット『CMXシリーズ』 画像2.jpg ?マイクロスコープユニット『CMXシリーズ』 画像3.jpg ?マイクロスコープユニット『CMXシリーズ』 画像4.jpg ?マイクロスコープユニット『CMXシリーズ』 画像5.jpg ?マイクロスコープユニット『CMXシリーズ』 画像6.jpg ?マイクロスコープユニット『CMXシリーズ』 画像7.jpg ?マイクロスコープユニット『CMXシリーズ』 画像8.jpg ?マイクロスコープユニット『CMXシリーズ』 画像9.jpg ?マイクロスコープユニット『CMXシリーズ』 画像10.jpg
  • For details on the microscope unit "CMX series," click here.
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**Features** - Achieves realistic microscope images with high NA objective lenses - Equipped with a back focus adjustment mechanism (adjustment range ±2.5) - Compatible with objective lenses from various manufacturers - Standardly equipped with coaxial reflected illumination **Our Strengths** We design and manufacture microscopes, medical optical devices, and precision optical lens systems. With high-quality optical and mechanical technology, we respond to customer needs with flexible made-to-order production. Based on over 100 years of optical technology, we aim to be a company that helps many customers achieve leaps and growth by seeking infinite possibilities.

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Microscope Unit CMX Series

Microscope Unit CMX Series

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Microscope Unit CMX05 Series

Microscope Unit CMX05 Series

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Microscope Unit CMX10 Series

Microscope Unit CMX10 Series

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Microscope Unit CMX10-3 Series

Microscope Unit CMX10-3 Series

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Long working distance objective lens COX series

Long working distance objective lens COX series

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千代田光機

千代田光機

Optical Instruments

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Our company designs and manufactures microscopes, medical optical devices, and precision optical lens systems. We aim to be a company that meets your needs by responding to the high quality of our optical and mechanical technologies and offering flexible made-to-order production. Based on over 100 years of optical technology, we seek infinite possibilities to help many customers achieve leaps and growth. Please feel free to contact us with your requests.

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