EE610 Low Differential Pressure Sensor for Semiconductors

Contributing to the improvement of exhaust management accuracy!

In the semiconductor manufacturing process, maintaining a clean environment is essential, and proper management of the exhaust system is required. In particular, to prevent the leakage of harmful substances and fine particles, it is important to accurately monitor exhaust pressure and detect anomalies early. Pressure that is too low can lead to a decrease in exhaust capacity, while pressure that is too high can cause increased load on the system and lead to failures. The EE610 low differential pressure sensor maintains the optimal condition of the exhaust system through high-precision differential pressure measurement, ensuring the safety of the manufacturing environment. 【Application Scenarios】 - Exhaust systems in clean rooms - Exhaust management for semiconductor manufacturing equipment - Monitoring of hazardous gas emission facilities 【Benefits of Implementation】 - Early detection of anomalies in the exhaust system to prevent accidents - Improved safety of the manufacturing environment - Increased equipment operating rates

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