Zero friction resistance improves the quality and efficiency of semiconductor manufacturing processes.
In the semiconductor manufacturing industry, high-precision positioning and a clean environment are essential. Particularly in the transportation of wafers and substrates, as well as in precise assembly processes, the generation of fine dust and positional shifts due to friction significantly affect product quality. Conventional cylinders have faced challenges with sliding resistance and dust generation. This product utilizes air bearing technology to achieve non-contact between the rod and guide, resulting in zero friction resistance. Furthermore, it is compatible with clean room environments, meeting the stringent requirements of semiconductor manufacturing. 【Usage Scenarios】 - Wafer transportation - Precision polishing equipment - Positioning of semiconductor manufacturing equipment 【Benefits of Implementation】 - Achieves high-precision positioning - Reduces dust generation, contributing to improved product quality - Compatible with clean room environments
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basic information
【Features】 - By adopting air bearings in the guide sections of the piston and rod, it strokes without contact, eliminating friction resistance. - The use of porous metal sintered air bearings provides higher lateral rigidity compared to conventional products. - Standard lineup ranges from Φ10 to Φ100, with special adaptations available up to Φ190. - There are two operating types: single-acting extrusion type and double-acting type. - Custom products tailored to customer specifications can be manufactured. 【Our Strengths】 We manufacture and sell products utilizing various rubber products and composite (integration) technology, providing products tailored to customer needs.
Price information
The price varies depending on the quantity, so please feel free to contact us.
Delivery Time
※The delivery time may vary depending on the quantity, so please feel free to contact us.
Applications/Examples of results
It is adopted in devices that require precision and accuracy. ● Self-weight cancellation of the processing head and sensor head (balancer) ⇒ LCD bonding, three-dimensional measuring machines ● Precision pressure control ⇒ Various bonding, mounting devices, and peripheral equipment for semiconductor and LCD manufacturing ● Machine tools ⇒ Nano processing machines, polishing machines, welding machines, etc. ● Tension control ⇒ For high-performance fiber processing machines By combining with our regulators [RS][RS.M/S], more advanced control becomes possible.
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Company information
In addition to industrial rubber parts, we are widely engaged in various fields such as fluid control equipment, vibration isolation tables and related equipment, printing machinery, electrical and electronic devices, rescue and lifesaving equipment, and the manufacturing and sales of golf carbon shafts.
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