Accurately measuring compressed gas flow in semiconductor manufacturing contributes to leak detection and energy conservation.
In the semiconductor manufacturing industry, maintaining cleanliness in the manufacturing process is extremely important. Trace contaminants in compressed air and industrial gases can not only degrade product quality but also potentially cause equipment failures. In particular, gas leaks due to leaks are a significant factor that compromises cleanliness. The EE741 contributes to maintaining cleanliness by accurately measuring compressed gas flow and detecting leaks early. It also leads to energy savings. 【Usage Scenarios】 - Monitoring flow rates of compressed air, nitrogen gas, etc., in the semiconductor manufacturing process - Leak detection in gas supply lines within clean rooms - Energy savings through optimization of gas supply to manufacturing equipment 【Benefits of Implementation】 - Maintenance of cleanliness through early leak detection - Cost reduction through optimization of gas usage - Improvement in product quality - Stable operation of manufacturing equipment
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**Features** - Removable without disassembling piping due to modular design - Analog, pulse, switching output, Modbus RTU, and M-Bus - Long-term stability and fast response achieved through the principle of thermal measurement and E+E thermal film sensor elements - Exceptional measurement accuracy even in low ranges due to application-specific multipoint functionality - Compatible with compressed gases in pipes from DN15 to DN50 **Our Strengths** Leveraging the know-how cultivated as a domestic dew point meter manufacturer, we provide product selection tailored to customer needs and optimal solutions. In addition to selling measuring instruments, we also offer calibration, inspection, and repair services, ensuring comprehensive support after product implementation.
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Applications/Examples of results
● Measurement of compressed air consumption ● Monitoring of technical gases O2, N2, Ar, CO₂. Other gases can be accommodated upon request ● Nitrogen generation system ● Leak detection etc.
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.
